Optical depth sectioning in the aberration-corrected scanning transmission and scanning confocal electron microscope

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Optical depth sectioning in the aberration-corrected scanning transmission and scanning confocal electron microscope

The use of spherical aberration correctors in the scanning transmission electron microscope (STEM) has the effect of reducing the depth of field of the microscope, making three-dimensional imaging of a specimen possible by optical sectioning. Depth resolution can be improved further by placing aberration correctors and lenses pre and post specimen to achieve an imaging mode known as scanning co...

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Three-dimensional imaging by optical sectioning in the aberration-corrected scanning transmission electron microscope.

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Scanning confocal electron microscopy (SCEM) is a new imaging mode in electron microscopy. Spherical aberration corrected electron microscope instruments fitted with two aberration correctors can be used in this mode which provides improved depth resolution and selectivity compared to optical sectioning in a conventional scanning transmission geometry. In this article, we consider a confocal op...

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ژورنال

عنوان ژورنال: Journal of Physics: Conference Series

سال: 2008

ISSN: 1742-6596

DOI: 10.1088/1742-6596/126/1/012083